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发表于:2008-6-1 3:26:56
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MOSFET

MOSFET
开放分类: 电子电源元器件
金属-氧化层-半导体-场效晶体管,简称金氧半场效晶体管(Metal-Oxide-Semiconductor Field-Effect Transistor, MOSFET)是一种可以广泛使用在类比电路与数位电路的场效晶体管(field-effect transistor)。MOSFET依照其“通道”的极性不同,可分为n-type与p-type的MOSFET,通常又称为NMOSFET与PMOSFET,其他简称尚包括NMOS FET、PMOS FET、nMOSFET、pMOSFET等。

从目前的角度来看MOSFET的命名,事实上会让人得到错误的印象。因为MOSFET里代表“metal”的第一个字母M在当下大部分同类的元件里是不存在的。早期MOSFET的栅极(gate electrode)使用金属作为其材料,但随著半导体技术的进步,现代的MOSFET栅极早已用多晶硅取代了金属。

MOSFET在概念上属于“绝缘栅极场效晶体管”(Insulated-Gate Field Effect Transistor, IGFET),而IGFET的栅极绝缘层有可能是其他物质而非MOSFET使用的氧化层。有些人在提到拥有多晶硅栅极的场效晶体管元件时比较喜欢用IGFET,但是这些IGFET多半指的是MOSFET。

MOSFET里的氧化层位于其通道上方,依照其操作电压的不同,这层氧化物的厚度仅有数十至数百埃(Å)不等,通常材料是二氧化硅(silicon dioxide, SiO2),不过有些新的进阶制程已经可以使用如氮氧化硅(silicon oxynitride, SiON)做为氧化层之用。

今日半导体元件的材料通常以硅(silicon)为首选,但是也有些半导体公司发展出使用其他半导体材料的制程,当中最著名的例如IBM使用硅与锗(germanium)的混合物所发展的硅锗制程(silicon-germanium process, SiGe process)。而可惜的是很多拥有良好电性的半导体材料,如砷化镓(gallium arsenide, GaAs),因为无法在表面长出品质够好的氧化层,所以无法用来制造MOSFET元件。

当一个够大的电位差施于MOSFET的栅极与源极(source)之间时,电场会在氧化层下方的半导体表面形成感应电荷,而这时所谓的“反型层”(inversion channel)就会形成。通道的极性与其漏极(drain)与源极相同,假设漏极和源极是n-type,那么通道也会是n-type。通道形成后,MOSFET即可让电流通过,而依据施于栅极的电压值不同,可由MOSFET的通道流过的电流大小亦会受其控制而改变。

电路符号
常用于MOSFET的电路符号有很多种变化,最常见的设计是以一条直线代表通道,两条和通道垂直的线代表源极与漏极,左方和通道平行而且较短的线代表栅极,如下图所示。有时也会将代表通道的直线以破折线代替,以区分增强型MOSFET(enhancement mode MOSFET)或是耗尽型MOSFET(depletion mode MOSFET)。

由于积体电路芯片上的MOSFET为四端元件,所以除了栅极、源极、漏极外,尚有一基极(Bulk或是Body)。MOSFET电路符号中,从通道往右延伸的箭号方向则可表示此元件为n-type或是p-type的MOSFET。箭头方向永远从P端指向N端,所以箭头从通道指向基极端的为p-type的MOSFET,或简称PMOS(代表此元件的通道为p-type);反之若箭头从基极指向通道,则代表基极为p-type,而通道为n-type,此元件为n-type的MOSFET,简称NMOS。在一般分布式MOSFET元件(discrete device)中,通常把基极和源极接在一起,故分布式MOSFET通常为三端元件。而在积体电路中的MOSFET通常因为使用同一个基极(common bulk),所以不标示出基极的极性,而在PMOS的栅极端多加一个圆圈以示区别。

[编辑] MOSFET的操作原理

[编辑] MOSFET的核心:金属—氧化层—半导体电容

金属—氧化层—半导体结构MOSFET在结构上以一个金属—氧化层—半导体的电容为核心(如前所述,今日的MOSFET多半以多晶硅取代金属作为其栅极材料),氧化层的材料多半是二氧化硅,其下是作为基极的硅,而其上则是作为栅极的多晶硅。这样子的结构正好等于一个电容器(capacitor),氧化层扮演电容器中介电质(dielectric material)的角色,而电容值由氧化层的厚度与二氧化硅的介电常数(dielectric constant)来决定。栅极多晶硅与基极的硅则成为MOS电容的两个端点。

当一个电压施加在MOS电容的两端时,半导体的电荷分布也会跟著改变。考虑一个p-type的半导体(电洞浓度为NA)形成的MOS电容,当一个正的电压VGB施加在栅极与基极端(如图)时,电洞的浓度会减少,电子的浓度会增加。当VGB够强时,接近栅极端的电子浓度会超过电洞。这个在p-type半导体中,电子浓度(带负电荷)超过电洞(带正电荷)浓度的区域,便是所谓的反转层(inversion layer)。

MOS电容的特性决定了MOSFET的操作特性,但是一个完整的MOSFET结构还需要一个提供多数载子(majority carrier)的源极以及接受这些多数载子的漏极。


[编辑] MOSFET的结构

一个NMOS晶体管的立体截面图左图是一个n-type MOSFET(以下简称NMOS)的截面图。如前所述,MOSFET的核心是位于中央的MOS电容,而左右两侧则是它的源极与漏极。源极与漏极的特性必须同为n-type(即NMOS)或是同为p-type(即PMOS)。右图NMOS的源极与漏极上标示的“N+”代表著两个意义:(1)N代表掺杂(doped)在源极与漏极区域的杂质极性为N;(2)“+”代表这个区域为高掺杂浓度区域(heavily doped region),也就是此区的电子浓度远高于其他区域。在源极与漏极之间被一个极性相反的区域隔开,也就是所谓的基极(或称基体)区域。如果是NMOS,那么其基体区的掺杂就是p-type。反之对PMOS而言,基体应该是n-type,而源极与漏极则为p-type(而且是重掺杂的P+)。基体的掺杂浓度不需要如源极或漏极那么高,故在右图中没有“+”。

对这个NMOS而言,真正用来作为通道、让载子通过的只有MOS电容正下方半导体的表面区域。当一个正电压施加在栅极上,带负电的电子就会被吸引至表面,形成通道,让n-type半导体的多数载子—电子可以从源极流向漏极。如果这个电压被移除,或是放上一个负电压,那么通道就无法形成,载子也无法在源极与漏极之间流动。

假设操作的对象换成PMOS,那么源极与漏极为p-type、基体则是n-type。在PMOS的栅极上施加负电压,则半导体上的电洞会被吸引到表面形成通道,半导体的多数载子—电洞则可以从源极流向漏极。假设这个负电压被移除,或是加上正电压,那么通道无法形成,一样无法让载子在源极和漏极间流动。

特别要说明的是,源极在MOSFET里的意思是“提供多数载子的来源”。对NMOS而言,多数载子是电子;对PMOS而言,多数载子是电洞。相对的,漏极就是接受多数载子的端点。


[编辑] MOSFET的操作模式

NMOS的漏极电流与漏极电压之间在不同VGS ? Vth的关系
MOSFET在线性区操作的截面图
MOSFET在饱和区操作的截面图依照在MOSFET的栅极、源极,与漏极等三个端点施加的“偏压”(bias)不同,一个常见的加强型(enhancement mode)n-type MOSFET有下列三种操作区间:

截止或次临限区(cut-off or sub-threshold region)
当栅极和源极间的电压VGS(G代表栅极,S代表源极)小于一个称为临界电压(threshold voltage, Vth)的值时,这个MOSFET是处在“截止”(cut-off)的状态,电流无法流过这个MOSFET,也就是这个MOSFET不导通。
但事实上当VGS<Vth、MOSFET无电流通过的叙述和现实有些微小的差异。在真实的状况下,因为载子的能量依循波兹曼分布(Boltzmann distribution)而有高低的差异。虽然当VGS<Vth的状况下,MOSFET的通道没有形成,但仍然有些具有较高能量的载子可以从半导体表面流至漏极。而若是VGS略高于0,但小于Vth的情况下,还会有一个称为“弱反转层”(weak inversion layer)的区域在半导体表面出现,让更多载子流过。透过弱反转而从源极流至漏极的载子数量与VGS的大小之间呈指数的关系,这样的电流又称为次临限电流(subthreshold current)。
在一些拥有大量MOSFET的积体电路产品,如DRAM,次临限电流往往会造成额外的能量或功率消耗。
三极或线性区(triode or linear region)
当VGS>Vth、且VDS<VGS-Vth,此处VDS为NMOS漏极至源极的电压,则这颗NMOS为导通的状况,在氧化层下方的通道也已形成。此时这颗NMOS的行为类似一个压控电阻(voltage-controlled resistor)

[编辑] MOSFET在电子电路上应用的优势
MOSFET在1960年由贝尔实验室(Bell Lab.)的D. Kahng和 Martin Atalla首次实作成功,这种元件的操作原理和1947年萧克莱(William Shockley)等人发明的双载子晶体管(Bipolar Junction Transistor, BJT)截然不同,且因为制造成本低廉与使用面积较小、高整合度的优势,在大型积体电路(Large-Scale Integrated Circuits, LSI)或是超大型积体电路(Very Large-Scale Integrated Circuits, VLSI)的领域里,重要性远超过BJT。

近年来由于MOSFET元件的性能逐渐提升,除了传统上应用于诸如微处理器、微控制器等数位讯号处理的场合上,也有越来越多类比讯号处理的积体电路可以用MOSFET来实现,以下分别介绍这些应用。


[编辑] 数位电路
数位科技的进步,如微处理器运算效能不断提升,带给深入研发新一代MOSFET更多的动力,这也使得MOSFET本身的操作速度越来越快,几乎成为各种半导体主动元件中最快的一种。MOSFET在数位讯号处理上最主要的成功来自CMOS逻辑电路的发明,这种结构最大的好处是理论上不会有静态的功率损耗,只有在逻辑门(logic gate)的切换动作时才有电流通过。CMOS逻辑门最基本的成员是CMOS反相器(inverter),而所有CMOS逻辑门的基本操作都如同反相器一样,同一时间内必定只有一种晶体管(NMOS或是PMOS)处在导通的状态下,另一种必定是截止状态,这使得从电源端到接地端不会有直接导通的路径,大量节省了电流或功率的消耗,也降低了积体电路的发热量。

MOSFET在数位电路上应用的另外一大优势是对直流(DC)讯号而言,MOSFET的栅极端阻抗为无限大(等效于开路),也就是理论上不会有电流从MOSFET的栅极端流向电路里的接地点,而是完全由电压控制栅极的形式。这让MOSFET和他们最主要的竞争对手BJT相较之下更为省电,而且也更易于驱动。在CMOS逻辑电路里,除了负责驱动芯片外负载(off-chip load)的驱动器(driver)外,每一级的逻辑门都只要面对同样是MOSFET的栅极,如此一来较不需考虑逻辑门本身的驱动力。相较之下,BJT的逻辑电路(例如最常见的TTL)就没有这些优势。MOSFET的栅极输入电阻无限大对于电路设计工程师而言亦有其他优点,例如较不需考虑逻辑门输出端的负载效应(loading effect)。


[编辑] 模拟电路
有一段时间,MOSFET并非模拟电路设计工程师的首选,因为模拟电路设计重视的性能参数,如晶体管的转导(transconductance)或是电流的驱动力上,MOSFET不如BJT来得适合模拟电路的需求。但是随著MOSFET技术的不断演进,今日的CMOS技术也已经可以符合很多模拟电路的规格需求。再加上MOSFET因为结构的关系,没有BJT的一些致命缺点,如热破坏(thermal runaway)。另外,MOSFET在线性区的压控电阻特性亦可在积体电路里用来取代传统的多晶硅电阻(poly resistor),或是MOS电容本身可以用来取代常用的多晶硅—绝缘体—多晶硅电容(PIP capacitor),甚至在适当的电路控制下可以表现出电感(inductor)的特性,这些好处都是BJT很难提供的。也就是说,MOSFET除了扮演原本晶体管的角色外,也可以用来作为模拟电路中大量使用的被动元件(passive device)。这样的优点让采用MOSFET实现模拟电路不但可以满足规格上的需求,还可以有效缩小芯片的面积,降低生产成本。

随著半导体制造技术的进步,对于整合更多功能至单一芯片的需求也跟著大幅提升,此时用MOSFET设计模拟电路的另外一个优点也随之浮现。为了减少在印刷电路板(Printed Circuit Board, PCB)上使用的积体电路数量、减少封装成本与缩小系统的体积,很多原本独立的类比芯片与数位芯片被整合至同一个芯片内。MOSFET原本在数位积体电路上就有很大的竞争优势,在类比积体电路上也大量采用MOSFET之后,把这两种不同功能的电路整合起来的困难度也显著的下降。另外像是某些混合讯号电路(Mixed-signal circuits),如类比/数位转换器(Analog-to-Digital Converter, ADC),也得以利用MOSFET技术设计出效能更好的产品。

近年来还有一种整合MOSFET与BJT各自优点的制程技术:BiCMOS(Bipolar-CMOS)也越来越受欢迎。BJT元件在驱动大电流的能力上仍然比一般的CMOS优异,在可靠度方面也有一些优势,例如不容易被“静电放电”(ESD)破坏。所以很多同时需要复噪声号处理以及强大电流驱动能力的积体电路产品会使用BiCMOS技术来制作。


[编辑] MOSFET的尺寸缩放
过去数十年来,MOSFET的尺寸不断地变小。早期的积体电路MOSFET制程里,通道长度约在几个微米(micrometer)的等级。但是到了今日的积体电路制程,这个参数已经缩小了几十倍甚至超过一百倍。2006年初,Intel开始以65纳米(nanometer)的技术来制造新一代的微处理器,实际的元件通道长度可能比这个数字还小一些。至90年代末,MOSFET尺寸不断缩小,让积体电路的效能大大提升,而从历史的角度来看,这些技术上的突破和半导体制程的进步有著密不可分的关系。


[编辑] 为何要把MOSFET的尺寸缩小
基于以下几个理由,我们希望MOSFET的尺寸能越小越好。第一,越小的MOSFET象征其通道长度减少,让通道的等效电阻也减少,可以让更多电流通过。虽然通道宽度也可能跟著变小而让通道等效电阻变大,但是如果能降低单位电阻的大小,那么这个问题就可以解决。其次,MOSFET的尺寸变小意味著栅极面积减少,如此可以降低等效的栅极电容。此外,越小的栅极通常会有更薄的栅极氧化层,这可以让前面提到的通道单位电阻值降低。不过这样的改变同时会让栅极电容反而变得较大,但是和减少的通道电阻相比,获得的好处仍然多过坏处,而MOSFET在尺寸缩小后的切换速度也会因为上面两个因素加总而变快。第三个理由是MOSFET的面积越小,制造芯片的成本就可以降低,在同样的封装里可以装下更高密度的芯片。一片积体电路制程使用的晶圆尺寸是固定的,所以如果芯片面积越小,同样大小的晶圆就可以产出更多的芯片,于是成本就变得更低了。

虽然MOSFET尺寸缩小可以带来很多好处,但同时也有很多负面效应伴随而来。


[编辑] MOSFET的尺寸缩小后出现的困难
把MOSFET的尺寸缩小到一微米以下对于半导体制程而言是个挑战,不过现在的新挑战多半来自尺寸越来越小的MOSFET元件所带来过去不曾出现的物理效应。


[编辑] 次临限传导
由于MOSFET栅极氧化层的厚度也不断减少,所以栅极电压的上限也随之变少,以免过大的电压造成栅极氧化层崩溃(breakdown)。为了维持同样的性能,MOSFET的临界电压也必须降低,但是这也造成了MOSFET越来越难以完全关闭。也就是说,足以造成MOSFET通道区发生弱反转的栅极电压会比从前更低,于是所谓的次临限电流(subthreshold current)造成的问题会比过去更严重,特别是今日的积体电路芯片所含有的晶体管数量剧增,在某些VLSI的芯片,次临限传导造成的功率消耗竟然占了总功率消耗的一半以上。

不过反过来说,也有些电路设计会因为MOSFET的次临限传导得到好处,例如需要较高的转导/电流转换比(transconductance-to-current ratio)的电路里,利用次临限传导的MOSFET来达成目的的设计也颇为常见。


[编辑] 芯片内部连接导线的寄生电容效应
传统上,CMOS逻辑门的切换速度与其元件的栅极电容有关。但是当栅极电容随著MOSFET尺寸变小而减少,同样大小的芯片上可容纳更多晶体管时,连接这些晶体管的金属导线间产生的寄生电容效应就开始主宰逻辑门的切换速度。如何减少这些寄生电容,成了芯片效率能否向上突破的关键之一。


[编辑] 芯片发热量增加
当芯片上的晶体管数量大幅增加后,有一个无法避免的问题也跟著发生了,那就是芯片的发热量也大幅增加。一般的积体电路元件在高温下操作可能会导致切换速度受到影响,或是导致可靠度与寿命的问题。在一些发热量非常高的积体电路芯片如微处理器,目前需要使用外加的散热系统来缓和这个问题。

在功率晶体管(Power MOSFET)的领域里,通道电阻常常会因为温度升高而跟著增加,这样也使得在元件中pn-接面(pn-junction)导致的功率损耗增加。假设外置的散热系统无法让功率晶体管的温度保持在够低的水平,很有可能让这些功率晶体管遭到热破坏(thermal runaway)的命运。


[编辑] 栅极氧化层漏电流增加
栅极氧化层随著MOSFET尺寸变小而越来越薄,目前主流的半导体制程中,甚至已经做出厚度仅有1.2纳米的栅极氧化层,大约等于5个原子叠在一起的厚度而已。在这种尺度下,所有的物理现象都在量子力学所规范的世界内,例如电子的穿隧效应(tunneling effect)。因为穿隧效应,有些电子有机会越过氧化层所形成的位能障壁(potential barrier)而产生漏电流,这也是今日积体电路芯片功耗的来源之一。

为了解决这个问题,有一些介电常数比二氧化硅更高的物质被用在栅极氧化层中。例如铪(Hafnium)和锆(Zirconium)的金属氧化物(二氧化铪、二氧化锆)等高介电常数的物质均能有效降低栅极漏电流。栅极氧化层的介电常数增加后,栅极的厚度便能增加而维持一样的电容大小。而较厚的栅极氧化层又可以降低电子透过穿隧效应穿过氧化层的机率,进而降低漏电流。不过利用新材料制作的栅极氧化层也必须考虑其位能障壁的高度,因为这些新材料的传导带(conduction band)和价带(valence band)和半导体的传导带与价带的差距比二氧化硅小(二氧化硅的传导带和硅之间的高度差约为8ev),所以仍然有可能导致栅极漏电流出现。


[编辑] 制程变异更难掌控
现代的半导体制程工序复杂而繁多,任何一道制程都有可能造成积体电路芯片上的元件产生些微变异。当MOSFET等元件越做越小,这些变异所占的比例就可能大幅提升,进而影响电路设计者所预期的效能,这样的变异让电路设计者的工作变得更为困难。


[编辑] MOSFET的栅极材料
理论上MOSFET的栅极应该尽可能选择电性良好的导体,多晶硅在经过重掺杂之后的导电性可以用在MOSFET的栅极上,但是并非完美的选择。目前MOSFET使用多晶硅作为的理由如下:

1. MOSFET的临界电压(threshold voltage)主要由栅极与通道材料的功函数(work function)之间的差异来决定,而因为多晶硅本质上是半导体,所以可以藉由掺杂不同极性的杂质来改变其功函数。更重要的是,因为多晶硅和底下作为通道的硅之间能隙(bandgap)相同,因此在降低PMOS或是NMOS的临界电压时可以藉由直接调整多晶硅的功函数来达成需求。反过来说,金属材料的功函数并不像半导体那么易于改变,如此一来要降低MOSFET的临界电压就变得比较困难。而且如果想要同时降低PMOS和NMOS的临界电压,将需要两种不同的金属分别做其栅极材料,对于制程又是一个很大的变量。
2. 硅—二氧化硅接面经过多年的研究,已经证实这两种材料之间的缺陷(defect)是相对而言比较少的。反之,金属—绝缘体接面的缺陷多,容易在两者之间形成很多表面能阶,大为影响元件的特性。
3. 多晶硅的融点比大多数的金属高,而在现代的半导体制程中习惯在高温下沉积栅极材料以增进元件效能。金属的融点低,将会影响制程所能使用的温度上限。
不过多晶硅虽然在过去二十年是制造MOSFET栅极的标准,但也有若干缺点使得未来仍然有部份MOSFET可能使用金属栅极,这些缺点如下:

1. 多晶硅导电性不如金属,限制了讯号传递的速度。虽然可以利用掺杂的方式改善其导电性,但成效仍然有限。目前有些融点比较高的金属材料如:钨(Tungsten)、钛(Titanium)、钴(Cobalt)或是镍(Nickel)被用来和多晶硅制成合金。这类混合材料通常称为金属硅化物(silicide)。加上了金属硅化物的多晶硅栅极有著比较好的导电特性,而且又能够耐受高温制程。此外因为金属硅化物的位置是在栅极表面,离通道区较远,所以也不会对MOSFET的临界电压造成太大影响。
在栅极、源极与漏极都镀上金属硅化物的制程称为“自我对准金属硅化物制程”(Self-Aligned Silicide),通常简称salicide制程。
2. 当MOSFET的尺寸缩的非常小、栅极氧化层也变得非常薄时,例如现在的制程可以把氧化层缩到一纳米左右的厚度,一种过去没有发现的现象也随之产生,这种现象称为“多晶硅空乏”。当MOSFET的反转层形成时,有多晶硅空乏现象的MOSFET栅极多晶硅靠近氧化层处,会出现一个空乏层(depletion layer),影响MOSFET导通的特性。要解决这种问题,金属栅极是最好的方案。目前可行的材料包括钽(Tantalum)、钨、氮化钽(Tantalum Nitride),或是氮化钛(Titalium Nitride)。这些金属栅极通常和高介电常数物质形成的氧化层一起构成MOS电容。另外一种解决方案是将多晶硅完全的合金化,称为FUSI(FUlly-SIlicide polysilicon gate)制程。

[编辑] 各种常见的MOSFET技术

[编辑] 双栅极MOSFET
双栅极(dual-gate)MOSFET通常用在射频(Radio Frequency, RF)积体电路中,这种MOSFET的两个栅极都可以控制电流大小。在射频电路的应用上,双栅极MOSFET的第二个栅极大多数用来做增益、混频器或是频率转换的控制。


[编辑] 空乏式MOSFET
一般而言,空乏式(depletion mode)MOSFET比前述的加强式(enhancement mode)MOSFET少见。空乏式MOSFET在制造过程中改变掺杂到通道的杂质浓度,使得这种MOSFET的栅极就算没有加电压,通道仍然存在。如果想要关闭通道,则必须在栅极施加负电压。空乏式MOSFET最大的应用是在“常关型”(normally-off)的开关,而相对的,加强式MOSFET则用在“常开型”(normally-on)的开关上。


[编辑] NMOS逻辑
同样驱动能力的NMOS通常比PMOS所占用的面积小,因此如果只在逻辑门的设计上使用NMOS的话也能缩小芯片面积。不过NMOS逻辑虽然占的面积小,却无法像CMOS逻辑一样做到不消耗静态功率,因此在1980年代中期后已经渐渐退出市场。


[编辑] 功率MOSFET

功率晶体管单元的截面图。通常一个市售的功率晶体管都包含了数千个这样的单元。主条目:功率晶体管
功率MOSFET和前述的MOSFET元件在结构上就有著显著的差异。一般积体电路里的MOSFET都是平面式(planar)的结构,晶体管内的各端点都离芯片表面只有几个微米的距离。而所有的功率元件都是垂直式(vertical)的结构,让元件可以同时承受高电压与高电流的工作环境。一个功率MOSFET能耐受的电压是杂质掺杂浓度与n-type磊晶层(epitaxial layer)厚度的函数,而能通过的电流则和元件的通道宽度有关,通道越宽则能容纳越多电流。对于一个平面结构的MOSFET而言,能承受的电流以及崩溃电压的多寡都和其通道的长宽大小有关。对垂直结构的MOSFET来说,元件的面积和其能容纳的电流成大约成正比,磊晶层厚度则和其崩溃电压成正比。

值得一提的是采用平面式结构的功率MOSFET也并非不存在,这类元件主要用在高级的音响放大器中。平面式的功率MOSFET在饱和区的特性比垂直结构的对手更好。垂直式功率MOSFET则多半用来做开关切换之用,取其导通电阻(turn-on resistance)非常小的优点。


[编辑] DMOS
DMOS是双重扩散MOSFET(double-Diffused MOSFET)的缩写,大部分的功率MOSFET都是采用这种制作方式完成的。


[编辑] 以MOSFET实现类比开关
MOSFET在导通时的通道电阻低,而截止时的电阻近乎无限大,所以适合作为类比讯号的开关(讯号的能量不会因为开关的电阻而损失太多)。MOSFET作为开关时,其源极与漏极的分别和其他的应用是不太相同的,因为讯号可以从MOSFET栅极以外的任一端进出。对NMOS开关而言,电压最负的一端就是源极,PMOS则正好相反,电压最正的一端是源极。MOSFET开关能传输的讯号会受到其栅极—源极、栅极—漏极,以及漏极到源极的电压限制,如果超过了电压的上限可能会导致MOSFET烧毁。

MOSFET开关的应用范围很广,举凡需要用到取样持有电路(sample-and-hold circuits)或是截波电路(chopper circuits)的设计,例如类比数位转换器(A/D converter)或是切换电容滤波器(switch-capacitor filter)上都可以见到MOSFET开关的踪影。


[编辑] 单一MOSFET开关
当NMOS用来做开关时,其基极接地,栅极为控制开关的端点。当栅极电压减去源极电压超过其导通的临界电压时,此开关的状态为导通。栅极电压继续升高,则NMOS能通过的电流就更大。NMOS做开关时操作在线性区,因为源极与漏极的电压在开关为导通时会趋向一致。

PMOS做开关时,其基极接至电路里电位最高的地方,通常是电源。栅极的电压比源极低、超过其临界电压时,PMOS开关会打开。

NMOS开关能容许通过的电压上限为(Vgate-Vthn),而PMOS开关则为(Vgate+Vthp),这个值通常不是讯号原本的电压振幅,也就是说单一MOSFET开关会有让讯号振幅变小、讯号失真的缺点。


[编辑] 双重MOSFET(CMOS)开关
为了改善前述单一MOSFET开关造成讯号失真的缺点,于是使用一个PMOS加上一个NMOS的CMOS开关成为目前最普遍的做法。CMOS开关将PMOS与NMOS的源极与漏极分别连接在一起,而基极的接法则和NMOS与PMOS的传统接法相同。当输入电压在(VDD-Vthn)和(VSS+Vthp)时,PMOS与NMOS都导通,而输入小于(VSS+Vthp)时,只有NMOS导通,输入大于(VDD-Vthn)时只有PMOS导通。这样做的好处是在大部分的输入电压下,PMOS与NMOS皆同时导通,如果任一边的导通电阻上升,则另一边的导通电阻就会下降,所以开关的电阻几乎可以保持定值,减少讯号失真。
如果您认为本词条还有待完善,需要补充新内容或修改错误内容,请 编辑词条
参考资料:
 1.Sze, S. M., Physics of Semiconductor Devices 2nd ed. New York:Wiley, 1981
 2.Donald A. Neamen, Semiconductor Physics & Devices, 3rd ed. McGraw Hill, 2003
 3.Behzad Razavi, Design of Analog CMOS Integrated Circuits, 1st ed. McGraw Hill, 2002
 4.B. Jayant Baliga, Power Semiconductor Devices, PWS publishing Company, Boston.ISBN 0-534-94098-6
 5.Adel. S. Sedra and Kenneth. C. Smith, Microelectronics Circuits, 5th ed., Oxford, 2003

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什么是 MOSFET

什么是 MOSFET

一种电压驱动的场效应晶体管,以氧化物绝缘的金属或多晶为栅极,是单极晶体管,其工作依靠一种多数载流子(N型为电子,P型为空穴)的运动,而不是像双极结型场效应管(JFET)那样靠两种载流子同时运动。MOSFET的控制栅压作用于横跨绝缘层的沟道区,而不像结型场效应管那样横跨PN结。栅极用二氧化硅(SiO2)或氮化硅(SiN)来绝缘。MOSFET可以是P沟道也可以是N沟道,其工作可以是耗尽型或者增强型。MOSFET包括在CMOS和BiCMOS数字逻辑电路中,因为有源极和漏极之间的绝缘,所以MOSFET功耗低。另外MOSFET比JFET加工过程简单,硅的利用更经济,与基片更容易互连,也称为绝缘栅场效应晶体管(IGFET)。

MOSFET是Metal-Oxide-Silicon Field Effect Transistor的英文缩写,平面型器件结构,按照导电沟道的不同可以分为NMOS和PMOS器件。MOS器件基于表面感应的原理,是利用垂直的栅压VGS实现对水平IDS的控制。它是多子(多数载流子)器件。用跨导描述其放大能力。

NMOS和PMOS在结构上完全相像,所不同的是衬底和源漏的掺杂类型。简单地说,NMOS是在P型硅的衬底上,通过选择掺杂形成N型的掺杂区,作为NMOS的源漏区;PMOS是在N型硅的衬底上,通过选择掺杂形成P型的掺杂区,作为PMOS的源漏区。如图所示,两块源漏掺杂区之间的距离称为沟道长度L,而垂直于沟道长度的有效源漏区尺寸称为沟道宽度W。对于这种简单的结构,器件源漏是完全对称的,只有在应用中根据源漏电流的流向才能最后确认具体的源和漏。

MOSFET有什么优点?

MOSFET和双极性晶体管(BJT)相比,MOSFET是一种高输入阻抗、电压控制的器件;BJT则是一种低阻抗、电流控制的器件。在功率应用中采用MOSFET具有众多好处。

1、MOSFET的驱动电路比较简单。BJT可能需要多达20%的额定集电极电流以保证饱和度,而MOSFET需要的驱动电流则小得多,而且通常可以直接由CMOS或者集电极开路TTL驱动电路驱动;

2、MOSFET的开关速度比较迅速,MOSFET是一种多数载流子器件,能够以较高的速度工作,因为没有电荷存储效应;

3、MOSFET没有二次击穿失效机理,它在温度越高时往往耐力越强,而且发生热击穿的可能性越低,还可以在较宽的温度范围内提供较好的性能。

器件的栅电极是具有一定电阻率的多晶硅材料,这也是硅栅MOS器件的命名根据。在多晶硅栅与衬底之间是一层很薄的优质二氧化硅,它是绝缘介质,用于绝缘两个导电层:多晶硅栅和硅衬底,从结构上看,多晶硅栅-二氧化硅介质-掺杂硅衬底 (Poly-Si--SiO2--Si) 形成了一个典型的平板电容器,通过对栅电极施加一定极性的电荷,就必然地在硅衬底上感应等量的异种电荷。这样的平板电容器的电荷作用方式正是MOS器件工作的基础。

以SiO2为栅介质时,叫MOS器件,这是最常使用的器件形式。历史上也出现过以Al2O3为栅介质的MAS器件和以 Si3N4为栅介质的MNS 器件,以及以SiO2+Si3N4为栅介质的MNOS器件,统称为金属-绝缘栅-半导体器件--MIS 器件。

以Al为栅电极时,称铝栅器件。以重掺杂多晶硅(Poly-Si) 为栅电极时, 称硅栅器件。它是当前MOS器件的主流器件。 硅栅工艺是利用重掺杂的多晶硅来代替铝做为MOS管的栅电极,使MOS电路特性得到很大改善,它使VTP下降1.1V,也容易获得合适的VTN值并能提高开关速度和集成度。

硅栅工艺具有自对准作用,这是由于硅具有耐高温的性质。栅电极,更确切的说是在栅电极下面的介质层,是限定源、漏扩散区边界的扩散掩膜,使栅区与源、漏交迭的密勒电容大大减小,也使其它寄生电容减小,使器件的频率特性得到提高。另外,在源、漏扩散之前进行栅氧化,也意味着可得到浅结。

self aligned poly-silicon process 自对准多晶硅工艺

铝栅工艺为了保证栅金属与漏极铝引线之间有一定的间隔,要求漏扩散区面积要大些。而在硅栅工艺中覆盖源漏极的铝引线可重迭到栅区,这是因为有一绝缘层将栅区与源漏电极引线隔开,从而可使结面积减少30%~40%。

硅栅工艺还可提高集成度,这不仅是因为扩散自对准作用可使单元面积大为缩小,而且因为硅栅工艺可以使用“二层半布线”即一层铝布线,一层重掺杂多晶硅布线,一层重掺杂的扩散层布线。由于在制作扩散层时,多晶硅要起掩膜作用,所以扩散层不能与多晶硅层交叉,故称为两层半布线.铝栅工艺只有两层布线:一层铝布线,一层扩散层布线。硅栅工艺由于有两层半布线,既可使芯片面积比铝栅缩小50%又可增加布线灵活性。

当然,硅栅工艺较之铝栅工艺复杂得多,需增加多晶硅淀积、等离子刻蚀工序,而且由于表面层次多,台阶比较高,表面断铝,增加了光刻的困难,所以又发展了以Si3N4作掩膜的局部氧化LOCOS--Local oxidation on silicon (又称为 MOSIC 的局部氧化隔离工艺Local Oxidation Isolation for MOSIC) ,或称等平面硅栅工艺。

扩散条连线由于其电容较大,漏电流也较大,所以尽量少用,一般是将相应管子的源或漏区加以延伸而成。扩散条也用于短连线,注意扩散条不能跨越多晶硅层,有时把这层连线称为“半层布线”。因硼扩散薄层电阻为30~120Ω/□,比磷扩散的R□大得多,所以硼扩散连线引入的分布电阻更为可观,扩散连线的寄生电阻将影响输出电平是否合乎规范值,同时也因加大了充放电的串联电阻而使工作速度下降。因此,在CMOS电路中,当使用硼扩散条做连线用时要考虑到这一点。

当在NMOS的栅上施加相对于源的正电压VGS时,栅上的正电荷在P型衬底上感应出等量的负电荷,随着VGS的增加,衬底中接近硅-二氧化硅界面的表面处的负电荷也越多。其变化过程如下:当VGS比较小时,栅上的正电荷还不能使硅-二氧化硅界面处积累可运动的电子电荷,这是因为衬底是P型的半导体材料,其中的多数载流子是正电荷空穴,栅上的正电荷首先是驱赶表面的空穴,使表面正电荷耗尽,形成带固定负电荷的耗尽层。

这时,虽然有VDS的存在,但因为没有可运动的电子,所以,并没有明显的源漏电流出现。增加VGS,耗尽层向衬底下部延伸,并有少量的电子被吸引到表面,形成可运动的电子电荷,随着VGS的增加,表面积累的可运动电子数量越来越多。这时的衬底负电荷由两部分组成:表面的电子电荷与耗尽层中的固定负电荷。如果不考虑二氧化硅层中的电荷影响,这两部分负电荷的数量之和等于栅上的正电荷的数量。当电子积累达到一定水平时,表面处的半导体中的多数载流子变成了电子,即相对于原来的P型半导体,具有了N型半导体的导电性质,这种情况称为表面反型。

WikiPedia关于MOSFET的定义:

The metal-oxide-semiconductor field-effect transistor (MOSFET, MOS-FET, or MOS FET), is by far the most common field-effect transistor in both digital and analog circuits. The MOSFET is composed of a channel of n-type or p-type semiconductor material (see article on semiconductor devices), and is accordingly called an NMOSFET or a PMOSFET (also commonly nMOSFET, pMOSFET, NMOS FET, PMOS FET, nMOS FET, pMOS FET).

The 'metal' in the name is an anachronism from early chips in which the gates were metal; modern chips use polysilicon gates. IGFET is a related, more general term meaning insulated-gate field-effect transistor, and is almost synonymous with "MOSFET", though it can refer to FETs with a gate insulator that is not oxide. Some prefer to use "IGFET" when referring to devices with polysilicon gates, but most still call them MOSFETs.

Usually the semiconductor of choice is silicon, but some chip manufacturers, most notably IBM, have begun to use a mixture of silicon and germanium (SiGe) in MOSFET channels. Unfortunately, many semiconductors with better electrical properties than silicon, such as gallium arsenide, do not form good gate oxides and thus are not suitable for MOSFETs.

The gate terminal is a layer of polysilicon (polycrystalline silicon; why polysilicon is used will be explained below) placed over the channel, but separated from the channel by a thin insulating layer of what was traditionally silicon dioxide, but more advanced technologies used silicon oxynitride. When a voltage is applied between the gate and source terminals, the electric field generated penetrates through the oxide and creates a so-called "inversion channel" in the channel underneath. The inversion channel is of the same type — P-type or N-type — as the source and drain, so it provides a conduit through which current can pass. Varying the voltage between the gate and body modulates the conductivity of this layer and makes it possible to control the current flow between drain and source.

Circuit symbols

A variety of symbols are used for the MOSFET. The basic design is generally a line for the channel with the source and drain leaving it at right angles and then bending back into the same direction as the channel. Sometimes a broken line is used for enhancement mode and a solid one for depletion mode, but the awkwardness of drawing broken lines means this distinction is often ignored. Another line is drawn parallel to the channel for the gate.

The bulk connection, if shown, is shown connected to the back of the channel with an arrow indicating PMOS or NMOS. Arrows always point from P to N, so an NMOS (N-channel in P-well or P-substrate) has the arrow pointing in. If the bulk is connected to the source (as is generally the case with discrete devices) it is angled to meet up with the source leaving the transistor. If the bulk is not shown (as is often the case in IC design as they are generally common bulk) an inversion symbol is sometimes used to indicate PMOS.

Comparison of enhancement and depletion mode symbols, along with JFET symbols:

P-channel
N-channel
JFET MOSFET enh MOSFET dep

For the symbols in which the bulk, or body, terminal is shown, it is here shown internally connected to the source. This is a typical configuration, but by no means the only important configuration. In general, the MOSFET is a four-terminal device, and in integrated circuits many of the MOSFETs share a body connection, not necessarily connected to the source terminals of all the transistors.

MOSFET operation

Metal-oxide-semiconductor structure

Metal-oxide-semiconductor structure
Metal-oxide-semiconductor structure

A metal-oxide-semiconductor (MOS) structure is obtained by depositing a layer of silicon dioxide (SiO2) and a layer of metal (polycrystalline silicon is actually used instead of metal) on top of a semiconductor die. As the silicon dioxide is a dielectric material its structure is equivalent to a plane capacitor, with one of the electrodes replaced by a semiconductor.

When a voltage is applied across a MOS structure, it modifies the distribution of charges in the semiconductor. If we consider a P-type semiconductor (with NA the density of holes), a positive VGB (see figure) tends to reduce the concentration of holes and increase the concentration of electrons. If VGB is high enough, the concentration of negative charge carriers near the gate is more than that of positive charges, in what is known as an inversion layer.

This structure with P-type body is the basis of the N-type MOSFET, which requires the addition of an N-type source and drain regions.

MOSFET structure

Cross Section of an NMOS
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Cross Section of an NMOS

A metal-oxide-semiconductor field-effect transistor (MOSFET) is based on the modulation of charge concentration caused by a MOS capacitance. It includes two terminals (source and drain) each connected to separate highly doped regions. These regions can be either P or N type, but they must both be of the same type. The highly doped regions are typically denoted by a '+' following the type of doping (see the image at the right). These two regions are separated by a doped region of opposite type, known as the body. This region is not highly doped, denoted by the lack of a '+' sign. The active region constitutes a MOS capacitance with a third electrode, the gate, which is located above the body and insulated from all of the other regions by an oxide.

If the MOSFET is an N-Channel or nMOS FET, then the source and drain are 'N+' regions and the body is a 'P' region. When a positive gate-source voltage is applied, it creates an N-channel at the surface of the P region, just under the oxide. This channel spreads from the source to the drain and provides conductivity of the transistor. When zero or negative voltage is applied between gate and source, the channel disappears and no current can flow between the source and the drain.

If the MOSFET is an P-Channel or pMOS FET, then the source and drain are 'P+' regions and the body is a 'N' region. When a negative gate-source voltage (positive source-gate) is applied, it creates a P-channel at the surface of the N region, just under the oxide. This channel spreads from the source to the drain and provides conductivity of the transistor. When no or a positive voltage is applied between gate and body, the channel disappears and no current can flow between the source and the drain.

The source is so named because it is the source of the charge carriers (electrons for N-channel, holes for P-channel) that flow through the channel; similarly, the drain is where the charge carriers leave the channel.

Modes of operation

Evolution of the drain current of a MOSFET with the drain-to-source voltage for several VGS ? Vth values.
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Evolution of the drain current of a MOSFET with the drain-to-source voltage for several VGS ? Vth values.
Cross section of a MOSFET operating in the linear region
Enlarge
Cross section of a MOSFET operating in the linear region
Cross section of a MOSFET operating in the saturation region
Enlarge
Cross section of a MOSFET operating in the saturation region

The operation of a MOSFET can be separated into three different modes, depending on the voltages at the terminals. For an enhancement mode, n-channel MOSFET the modes are:

Cut-off or sub-threshold mode
When VGS < Vth where Vth is the threshold voltage of the device.
According to the threshold model, the transistor is turned off, and there is no conduction between drain and source. In reality, the Boltzmann distribution of electron energies allows some of the more energetic electrons at the source to enter the channel and flow to the drain, resulting in a subthreshold current that is an exponential function of gate-source voltage. While the current between drain and source should ideally be zero when the transistor is being used as a turned-off switch, there is a weak-inversion current, sometimes called subthreshold leakage.
Triode or linear region
When VGS > Vth and VDS < VGS ? Vth
The transistor is turned on, and a channel has been created which allows current to flow between the drain and source. The MOSFET operates like a resistor, controlled by the gate voltage. The current from drain to source is:
I_D= \mu_n C_{ox}\frac{W}{L} \left( (V_{GS}-V_{th})V_{DS}-\frac{V_{DS}^2}{2} \right)
where μn is the charge-carrier mobility, W is the gate width, L is the gate length and Cox is the gate oxide capacitance per unit area. The transition from the exponential subthreshold region to the triode region is not as sharp as the equations suggest.
Saturation
When VGS > Vth and VDS > VGS ? Vth
The switch is turned on, and a channel has been created which allows current to flow between the drain and source. Since the drain voltage is higher than the gate voltage, a portion of the channel is turned off. The onset of this region is also known as pinch-off. The drain current is now relatively independent of the drain voltage (in a first-order approximation) and the current is only controlled by the gate voltage such that:
I_D = \frac{\mu_n C_{ox}}{2}\frac{W}{L}(V_{GS}-V_{th})^2
this equation can be multiplied by (1 + λVDS) to take into account the channel length modulation (Early effect).

Body effect

The body effect describes the changes in the threshold voltage by the change in the source-bulk voltage, approximated by the following equation:

V_{TN} = V_{TO} + \gamma \left( \sqrt{V_{SB} + 2\phi} - \sqrt{2\phi} \right),

where VTO is the zero substrate bias, γ is the body effect parameter, and is the surface potential parameter.

The body can be operated as a second gate, and is sometimes referred to as the "back gate"; the body effect is sometimes called the "back-gate effect". (http://equars.com/~marco/poli/phd/node20.html)

The primacy of MOSFETs

In 1960, Dawon Kahng and Martin Atalla at Bell Labs invented the metal oxide semiconductor field-effect transistor (MOSFET). Theoretically different from Shockley's transistor, the MOSFET was structured by putting an insulating layer on the surface of the semiconductor and then placing a metallic gate electrode on that. It used crystalline silicon for the semiconductor and a thermally oxidized layer of silicon dioxide for the insulator. Not only did it possess such technical attractions as low cost of production and ease of integration, the silicon MOSFET serendipitously did not generate localized electron traps (interface states) at the interface between the silicon and its native oxide layer, and thus was free of the characteristic that had impeded the performance of earlier transistors. Buoyed by this stroke of good fortune, the MOSFET has achieved electronic hegemony. It is this serendipity that sustains the large-scale integrated circuits (LSIs) underlying today's information society.

Digital

The growth of digital technologies like the microprocessor has provided the motivation to advance MOSFET technology faster than any other type of silicon-based transistor. The principal reason for the success of the MOSFET was the development of digital CMOS logic, which uses p- and n-channel MOSFETs as building blocks. The great advantage of CMOS logic is that they allow no current to flow (ideally), and thus no power to be consumed, except when the inputs to logic gates are being switched. CMOS accomplishes this by complementing every nMOSFET with a pMOSFET and connecting both gates and both drains together. A high voltage on the gates will cause the nMOSFET to conduct and the pMOSFET not to conduct and a low voltage on the gates causes the reverse. During the switching time the voltage goes from one state to another and both will conduct. This arrangement greatly reduces power consumption and heat generation. Overheating is a major concern in integrated circuits, since ever more transistors are packed into ever smaller chips.

Another advantage of MOSFETs for digital switching is that the oxide layer between the gate and the channel prevents DC current from flowing through the gate, further reducing power consumption and giving a very large input impedance. The insulating oxide between the gate and channel effectively isolates a MOSFET in one logic stage from earlier and consequent stages, which allows to drive a considerable number of MOSFET inputs from a single MOSFET output. Bipolar transistor-based logics (such as TTL) do not have such a high fanout capacity. This isolation also makes it easier for the designers to ignore to some extent loading effects between logic stages independently. That extent is defined by the operating frequency: as frequencies increase, the input impedance of the MOSFETs decreases.

Analog

The MOSFET's strengths as the workhorse transistor in most digital circuits do not translate into supremacy in analog circuits. The bipolar junction transistor (BJT) has traditionally been the analog designer's transistor of choice, due largely to its high transconductance and unique properties. Nevertheless, MOSFETs are widely relied upon for analog purposes as well. Some of the advantages of MOSFETs are that due to their positive temperature coefficient, they do not suffer from thermal runaway as BJTs do and that their linear region allows them to be used as precision resistors, which can have a much higher controlled resistance than BJTs. Also, they can be formed into capacitors and specialized circuits allow op-amps made from them to appear as inductors, thereby allowing all of the normal analog devices, except for diodes (which can be made smaller than a MOSFET anyway), to be built entirely out of MOSFETs. This allows for complete analog circuits to be made on a silicon chip in a much smaller space. Some ICs combine analog and digital MOSFET circuitry on a single chip, making the needed board space even smaller. This creates a need to isolate the analog circuits from the digital circuits on a chip level, leading to the use of isolation rings and Silicon-On-Insulator (SOI). The main advantage of BJTs vs MOSFETs in the analog design process is the ability of BJTs to handle a larger current in a smaller space. Fabrication processes exist that incorporate BJTs and MOSFETs into a single device, these mixed-transistor devices are called Bi-FETs (Bipolar-FETs) if they contain just one BJT-FET and BiCMOS (bipolar-CMOS) if they contain complementary BJT-FETs. This device provides for the advantages of both the insulated gate and the higher current density.

The BJT also has some advantages over the MOSFET in certain digital circuits. BJTs are currently better for at least 2 digital jobs. The first is in high speed switching because they don't have the "larger" capacitance from the gate, which when multiplied by the resistance of the channel gives the intrinsic time constant of the process. The intrinsic time constant places a limit on the speed a MOSFET can operate at because higher frequency signals are filtered out. Widening the channel reduces the resistance of the channel, but increases the capacitance by the exact same amount. Reducing the width of the channel increases the resistance, but reduces the capacitance by the same amount. R*C=Tc1, 0.5R*2C=Tc1, 2R*0.5C=Tc1. There is no way to minimize the intrinsic time constant for a certain process. Different processes using different channel lengths, channel heights, gate thicknesses and materials will have different intrinsic time constants. You can skip most of this problem with a BJT because it doesn't have a gate. The second job stems from the first. When driving many other gates, called fanning out, the resistance of the MOSFET is in series with the gate capacitances of the other FETs, creating a secondary time constant. Delay circuits use this fact to create a set signal delay by using a small CMOS device to send a signal to many other, many times larger CMOS devices. The secondary time constant can be minimized by increasing the driving FETs channel width to decrease its resistance and decreasing the channel width of the FETs being driven, decreasing their capacitance. This does have a drawback because it increases the capacitance of the driving FET and increases the resistance of the FETs being driven, but usually those drawbacks are a minimal problem when compared to the timing problem. BJTs are better to drive the other gates because they can output more current than MOSFETs, allowing for the FETs being driven to charge faster. Many chips will employ MOSFET inputs and BiCMOS (see above paragraph) outputs.

MOSFET scaling

Over the past decades, the MOSFET has continually been scaled down in size; typical MOSFET channel lengths were once several micrometres, but modern integrated circuits are incorporating MOSFETs with channel lengths of less than a tenth of a micrometre. Indeed Intel began production of a process featuring a 65 nm feature size (with the channel being even shorter) in early 2006. Until the late 1990s, this size reduction resulted in great improvement to MOSFET operation with no deleterious consequences. Historically, the difficulties with decreasing the size of the MOSFET have been associated with the semiconductor device fabrication process.

Reasons for MOSFET scaling

Smaller MOSFETs are desirable for several reasons. First, smaller MOSFETs may allow more current to pass, due to their shorter length dimension; conceptually, MOSFETs are like resistors in the on-state, and shorter resistors have less resistance; however, they may also have smaller widths, leading to proportionally higher resistance, so the real issue is whether the ohms per square is reduced. Second, smaller MOSFETs have smaller gate areas, and thus lower gate capacitance. Scales MOSFETs also have thinner gate dielectrics, which reduces the on-state ohms per square but makes the gate capacitance per unit area higher; nevertheless, these effects still both go in the right direction. These first two factors contribute to lower switching times, and thus higher processing speeds, and lower energy per switching event. A third reason for MOSFET scaling is reduced area, leading to reduced cost. Smaller MOSFETs can be packed more densely, resulting in either smaller chips or chips with more computing power in the same area. Because the cost of fabricating a semiconductor wafer is relatively fixed, the cost of the individual integrated circuits is mainly related to the number of chips that can be produced per wafer. Hence, smaller ICs allow more chips per wafer, reducing the price per chip.

Difficulties arising due to MOSFET scaling

Producing MOSFETs with channel lengths smaller than a micrometre is a challenge, and the difficulties of semiconductor device fabrication are always a limiting factor in advancing integrated circuit technology. Recently, the small size of the MOSFET has created operational problems.

Subthreshold conduction

Because of small MOSFET geometries, the voltage that can be applied to the gate must be reduced to maintain reliability. To maintain performance, the threshold voltage of the MOSFET has to be reduced as well. As threshold voltage is reduced, the transistor cannot be completely turned off; that is, the transistor operates in weak-inversion mode, with a subthreshold leakage, or subthreshold conduction, between source and drain. Subthreshold conduction, which was ignored in the past, now can consume upwards of half of the total power consumption of modern high-performance VLSI chips.

Some micropower analog circuits are designed to take advantage of subthreshold conduction; by working in the weak-inversion region, the MOSFETs in these circuits deliver the highest possible transconductance-to-current ratio.

Interconnect capacitance

Traditionally switching time was roughly proportional to the gate capacitance of gates. However, with transistors becoming smaller and more transistors being placed on the chip, interconnect capacitance (the capacitance of the wires connecting different parts of the chip) is becoming a large percentage of capacitance. Signals have to travel through the interconnect, which leads to increased delay and lower performance.

Heat production

The ever-increasing density of MOSFETs on an integrated circuit is creating problems of substantial localized heat generation that can impair circuit operation. Circuits operate slower at high temperatures, and have reduced reliability and shorter lifetimes. Heat sinks and other cooling methods are now required for many integrated circuits including microprocessors.

Power MOSFETs are at risk of thermal runaway. As their on-state resistance rises with temperature, the power loss on the junction rises correspondingly, generating further heat. When the heatsink is not able to keep the temperature low enough, the junction temperature may quickly and uncontrollably rise, resulting in destruction of the device.

Gate oxide leakage

The gate oxide, which serves as insulator between the gate and channel, should be made as thin as possible to increase the channel conductivity and performance when the transistor is on and to reduce subthreshold leakage when the transistor is off. However, with current gate oxides with a thickness of around 1.2 nm (which in silicon is ~5 atoms thick) the quantum mechanical phenomenon of electron tunneling occurs between the gate and channel, leading to increased power consumption.

Insulators (referred to as high-k dielectrics) that have a larger dielectric constant than silicon dioxide, such as group IVb metal silicates e.g. hafnium and zirconium silicates and oxides, are now being researched to reduce the gate leakage. Increasing the dielectric constant of the gate oxide material allows a thicker layer while maintaining a high capacitance. The higher thickness reduces the tunneling current between the gate and the channel. An important consideration is the barrier height of the new gate oxide; the difference in conduction band energy between the semiconductor and the oxide (and the corresponding difference in valence band energy) will also affect the leakage current level. For the traditional gate oxide, silicon dioxide, the former barrier is approximately 8 eV. For many alternative dielectrics the value is significantly lower, somewhat negating the advantage of higher dielectric constant.

Process variations

With MOSFETS becoming smaller, the number of atoms in the silicon that produce many of the transistor's properties is becoming fewer. During chip manufacturing, random process variation can affect the size of the transistor, which becomes a greater percentage of the overall transistor size as the transistor shrinks. The transistor characteristics become less deterministic, but more statistical. This statistical variation increases design difficulty.

MOSFET construction

Gate material

The primary criterion for the gate material is that it is a good conductor. Highly-doped polycrystalline silicon is an acceptable, but certainly not ideal conductor, and it also suffers from some more technical deficiencies in its role as the standard gate material. Nevertheless, there are several reasons favoring use of polysilicon as a gate material:

  1. The threshold voltage (and consequently the drain to source on-current) is determined by the work function difference between the gate material and channel material. Because polysilicon is a semiconductor, its work function can be modulated by adjusting the type and level of doping. Furthermore, because polysilicon has the same bandgap as the underlying silicon channel, it is quite straightforward to tune the work function, so as to achieve low threshold voltages for both NMOS and PMOS devices. By contrast the work functions of metals are not easily modulated, so tuning the work function to obtain low threshold voltages becomes a significant challenge. Additionally, obtaining low threshold devices on both PMOS and NMOS devices would likely require the use of different metals for each device type, adding additional complexity to the fabrication process.
  2. The Silicon-SiO2 interface has been well studied and is known to have relatively few defects. By contrast many metal-insulator interfaces contain significant levels of defects which can lead to fermi-level pinning, charging, or other phenomena that ultimately degrade device performance.
  3. In the MOSFET IC fabrication process, it is preferable to deposit the gate material prior to certain high-temperature steps in order to make better performing transistors. Such high temperature steps would melt some metals, limiting the types of metals that could be used in a metal-gate based process.

While polysilicon gates have been the defacto standard for the last twenty years, they do have some disadvantages, which could lead to their replacement by metal gates or other materials in the future. These disadvantages include:

  1. Polysilicon is not a great conductor (approximately 1000 times more resistive than metals) which reduces the signal propagation speed through the material. The resistivity can be lowered by increasing the level of doping, but even highly doped polysilicon is not as conductive as most metals. In order to improve resistivity further, sometimes a high temperature metal such as tungsten, titanium, cobalt, and more recently nickel, is alloyed with the top layers of the polysilicon. Such a blended material is called silicide. The silicide-polysilicon combination has better electrical properties than polysilicon alone and still does not melt in subsequent processing. Also the threshold voltage is not significantly higher than polysilicon alone, because the silicide material is not near the channel. The process in which silicide is formed on both the gate electrode and the source and drain regions is sometimes called salicide, self-aligned silicide.
  2. When the transistors are extremely scaled down, it is necessary to make the gate dielectric layer very thin, around 1 nm in state-of-the-art technologies. A phenomenon observed here is the so-called poly depletion, where a depletion layer is formed in the gate polysilicon layer next to the gate dielectric when the transistor is in the inversion. To avoid this problem a metal gate is desired. A variety of metal gates such as tantalum, tungsten, tantalum nitride, and titanium nitride, usually in conjunction with high-k dielectrics. An alternative is to use fully-silicided polysilicon gates, and the process is referred to as FUSI.

Other MOSFET types

Dual gate MOSFET

The dual gate MOSFET has a tetrode configuration, where both gates control the current in the device. It is commonly used for small signal devices in radio frequency applications where the second gate is normally used for gain control or mixing and frequency conversion.

Depletion mode MOSFETs

There are depletion mode MOSFET devices, which are less commonly used than the standard enhancement mode devices already described. These are MOSFET devices which are doped so that a channel exists even without any voltage applied to the gate. In order to control the channel, a negative voltage is applied to the gate, depleting the channel which reduces the current flow through the device. In essence, the depletion mode device is equivalent to a normally closed switch, while the enhancement mode device is equivalent to a normally open switch.

NMOS logic

n-channel MOSFETs are smaller than p-channel MOSFETs and producing only one type of MOSFET on a silicon substrate is cheaper and technically simpler. These were the driving principles in the design of NMOS logic which uses n-channel MOSFETs exclusively. However, unlike CMOS logic, NMOS logic consumes power even when no switching is taking place. With advances in technology, CMOS logic displaced NMOS logic in the 1980s to become the preferred process for digital chips.

Power MOSFET

Cross section of a Power MOSFET, with square cells. A typical transistor is constituted of several thousand cells
Enlarge
Cross section of a Power MOSFET, with square cells. A typical transistor is constituted of several thousand cells
Main article: Power MOSFET

Power MOSFETs have a different structure than the one presented above. As with all power devices, the structure is vertical and not planar. Using a vertical structure, it is possible for the transistor to sustain both high blocking voltage and high current. The voltage rating of the transistor is a function of the doping and thickness of the N epitaxial layer (see cross section), while the current rating is a function of the channel width (the wider the channel, the higher the current). In a planar structure, the current and breakdown voltage ratings are both function of the channel dimensions (respectively width and length of the channel), resulting in inefficient use of the "silicon estate". With the vertical structure, the component area is roughly proportional to the current it can sustain, and the component thickness (actually the N-epitaxial layer thickness) is proportional to the breakdown voltage.

It is worth noting that power MOSFETs with lateral structure exist. They are mainly used in high-end audio amplifiers. Their advantage is a better behaviour in the saturated region (corresponding to the linear region of a bipolar transistor) than the vertical MOSFETs. Vertical MOSFETs are designed for switching applications, so they are only used in On or Off states.

DMOS

DMOS stands for double-Diffused Metal Oxide Semiconductor. Most of the power MOSFETs are made using this technology.

MOSFET analog switch

MOSFET analog switches use the MOSFET channel as a low–on-resistance switch to pass analog signals when on, and as a high impedance when off. Signals flow in both directions across a MOSFET switch. In this application the drain and source of a MOSFET exchange places depending on the voltages of each electrode compared to that of the gate. For a simple MOSFET without an integrated diode, the source is the more negative side for an N-MOS or the more positive side for a P-MOS. All of these switches are limited on what signals they can pass or stop by their gate-source, gate-drain and source-drain voltages, and source-to-drain currents; exceeding the voltage limits will potentially damage the switch.

Single-type MOSFET switch:

This analog switch uses a four-terminal simple MOSFET of either P or N type. In the case of an N-type switch, the body is connected to GND and the gate is used as the switch control. Whenever the gate voltage exceeds the source voltage by at least a threshold voltage, the MOSFET conducts. The higher the voltage, the more the MOSFET conducts. An N-MOS will pass through all voltages less than (Vgate-Vtn), measured with respect to the body. The switches are usually operated in the saturation region, since the drain and source tend to the same voltage when the switch is on.

In the case of a P-MOS, the body is connected to Vdd and the gate is brought to a lower potential to turn the switch on. The P-MOS switch passes all voltages higher than (Vgate+Vtp), measured with respect to the body.

A P-MOS switch will have three times the resistance of an N-MOS device of equal dimensions because electrons have three times the mobility of holes in silicon.

Dual-type (CMOS) MOSFET switch:

This "complementary" or CMOS type of switch uses one P-MOS and one N-MOS FET to counteract the limitations of the single-type switch. The FETs have their drains and sources connected in parallel, the body of the P-MOS is connected to the high potential (VDD) and the body of the N-MOS is connected to the low potential (Gnd). To turn the switch on the gate of the P-MOS is driven to the low potential and the gate of the N-MOS is driven to the high potential. For voltages between (VDD-Vtn) and (Gnd+Vtp) both FETs conduct the signal, for voltages less than (Gnd+Vtp) the N-MOS conducts alone and for voltages greater than (VDD-Vtn) the P-MOS conducts alone.

The only limits for this switch are the gate-source, gate-drain and source-drain voltage limits for both FETs. Also, the P-MOS is typically three times the width of the N-MOS so the switch will be balanced.

Tri-state circuitry sometimes incorporates a CMOS MOSFET switch on its output to provide for a low ohmic, full range output when on and a high ohmic, mid level signal when off.

References

Power MOSFET

  • "Power Semiconductor Devices", B. Jayant Baliga, PWS publishing Company, Boston. ISBN 0-534-94098-6

External links

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CAN基本知识

什么是CAN ?
  CAN,全称为“Controller Area Network”,即控制器局域网,是国际上应用最广泛的现场总线之一。最初,CAN被设计作为汽车环境中的微控制器通讯,在车载各电子控制装置ECU之间交换信息,形成汽车电子控制网络。比如:发动机管理系统、变速箱控制器、仪表装备、电子主干系统中,均嵌入CAN控制装置。
  一个由CAN 总线构成的单一网络中,理论上可以挂接无数个节点。实际应用中,节点数目受网络硬件的电气特性所限制。例如,当使用Philips P82C250作为CAN收发器时,同一网络中允许挂接110个节点。CAN 可提供高达1Mbit/s的数据传输速率,这使实时控制变得非常容易。另外,硬件的错误检定特性也增强了CAN的抗电磁干扰能力。
  CAN 是怎样发展起来的?
  CAN最初出现在80年代末的汽车工业中,由德国Bosch公司最先提出。当时,由于消费者对于汽车功能的要求越来越多,而这些功能的实现大多是基于电子操作的,这就使得电子装置之间的通讯越来越复杂,同时意味着需要更多的连接信号线。提出CAN总线的最初动机就是为了解决现代汽车中庞大的电子控制装置之间的通讯,减少不断增加的信号线。于是,他们设计了一个单一的网络总线,所有的外围器件可以被挂接在该总线上。1993年,CAN 已成为国际标准ISO11898(高速应用)和ISO11519(低速应用)。
  CAN是一种多主方式的串行通讯总线,基本设计规范要求有高的位速率,高抗电磁干扰性,而且能够检测出产生的任何错误。当信号传输距离达到10Km时,CAN 仍可提供高达50Kbit/s的数据传输速率。
  由于CAN总线具有很高的实时性能,因此,CAN已经在汽车工业、航空工业、工业控制、安全防护等领域中得到了广泛应用。
  CAN 是怎样工作的?
  CAN通讯协议主要描述设备之间的信息传递方式。CAN层的定义与开放系统互连模型(OSI)一致。每一层与另一设备上相同的那一层通讯。实际的通讯发生在每一设备上相邻的两层,而设备只通过模型物理层的物理介质互连。CAN的规范定义了模型的最下面两层:数据链路层和物理层。下表中展示了OSI开放式互连模型的各层。应用层协议可以由CAN用户定义成适合特别工业领域的任何方案。已在工业控制和制造业领域得到广泛应用的标准是DeviceNet,这是为PLC和智能传感器设计的。在汽车工业,许多制造商都应用他们自己的标准。
  表1 OSI开放系统互连模型
  7 应用层 最高层。用户、软件、网络终端等之间用来进行信息交换。如:DeviceNet
  6 表示层 将两个应用不同数据格式的系统信息转化为能共同理解的格式
  5 会话层 依靠低层的通信功能来进行数据的有效传递。
  4 传输层 两通讯节点之间数据传输控制。操作如:数据重发,数据错误修复
  3 网络层 规定了网络连接的建立、维持和拆除的协议。如:路由和寻址
  2 数据链路层 规定了在介质上传输的数据位的排列和组织。如:数据校验和帧结构
  1 物理层 规定通讯介质的物理特性。如:电气特性和信号交换的解释
  
  CAN能够使用多种物理介质,例如双绞线、光纤等。最常用的就是双绞线。信号使用差分电压传送,两条信号线被称为“CAN_H”和“CAN_L”,静态时均是2.5V左右,此时状态表示为逻辑“1”,也可以叫做“隐性”。用CAN_H比CAN_L高表示逻辑“0”,称为“显形”,此时,通常电压值为:CAN_H = 3.5V 和CAN_L = 1.5V 。
   CAN 有哪些特性?
  CAN具有十分优越的特点,使人们乐于选择。这些特性包括:
   低成本
   极高的总线利用率
   很远的数据传输距离(长达10Km)
   高速的数据传输速率(高达1Mbit/s)
   可根据报文的ID决定接收或屏蔽该报文
   可靠的错误处理和检错机制
   发送的信息遭到破坏后,可自动重发
   节点在错误严重的情况下具有自动退出总线的功能
   报文不包含源地址或目标地址,仅用标志符来指示功能信息、优先级信息
  Philips制造的CAN芯片有哪些?
  表2 CAN芯片一览表
  类别 型号 备注
  CAN微控制器 P87C591 替代P87C592
  XA C37 16位MCU
  CAN独立控制器 SJA1000 替代82C200
  CAN收发器 PCA82C250 高速CAN收发器
  PCA82C251 高速CAN收发器
  PCA82C252 容错CAN收发器
  TJA1040 高速CAN收发器
  TJA1041 高速CAN收发器
  TJA1050 高速CAN收发器
  TJA1053 容错CAN收发器
  TJA1054 容错CAN收发器
  LIN收发器 TJA1020 LIN收发器
  
  什么是CSMA/CD ?
  CSMA/CD是“载波侦听多路访问/冲突检测”(Carrier Sense Multiple Access with Collision Detect)的缩写。
  利用CSMA访问总线,可对总线上信号进行检测,只有当总线处于空闲状态时,才允许发送。利用这种方法,可以允许多个节点挂接到同一网络上。当检测到一个冲突位时,所有节点重新回到‘监听’总线状态,直到该冲突时间过后,才开始发送。在总线超载的情况下,这种技术可能会造成发送信号经过许多延迟。为了避免发送时延,可利用CSMA/CD方式访问总线。当总线上有两个节点同时进行发送时,必须通过“无损的逐位仲裁”方法来使有最高优先权的的报文优先发送。在CAN总线上发送的每一条报文都具有唯一的一个11位或29位数字的ID。CAN总线状态取决于二进制数‘0’而不是‘1’,所以ID号越小,则该报文拥有越高的优先权。因此一个为全‘0’标志符的报文具有总线上的最高级优先权。可用另外的方法来解释:在消息冲突的位置,第一个节点发送0而另外的节点发送1,那么发送0的节点将取得总线的控制权,并且能够成功的发送出它的信息。
  
  CAN的高层协议
  CAN的高层协议(也可理解为应用层协议)是一种在现有的底层协议(物理层和数据链路层)之上实现的协议。高层协议是在CAN规范的基础上发展起来的应用层。许多系统(像汽车工业)中,可以特别制定一个合适的应用层,但对于许多的行业来说,这种方法是不经济的。一些组织已经研究并开放了应用层标准,以使系统的综合应用变得十分容易。
  一些可使用的CAN高层协议有:
  制定组织主要高层协议
  CiA CAL协议
  CiA CANOpen协议
  ODVA DeviceNet 协议
  Honeywell SDS 协议
  Kvaser CANKingdom协议
  什么是标准格式CAN和扩展格式CAN?
  标准CAN的标志符长度是11位,而扩展格式CAN的标志符长度可达29位。CAN 协议的2.0A版本规定CAN控制器必须有一个11位的标志符。同时,在2.0B版本中规定,CAN控制器的标志符长度可以是11位或29位。遵循CAN2.0B协议的CAN控制器可以发送和接收11位标识符的标准格式报文或29位标识符的扩展格式报文。如果禁止CAN2.0B,则CAN 控制器只能发送和接收11位标识符的标准格式报文,而忽略扩展格式的报文结构,但不会出现错误。
  目前,Philips公司主要推广的CAN独立控制器均支持CAN2.0B协议,即支持29位标识符的扩展格式报文结构

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发表于:2008-3-14 15:41:32
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